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1

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Dry Etching Of Niobium Oxyde Thin Films

Seabra, A. C., Verdonck, P., Xavier, W. L., Baranauskas, V., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 161 KB

english, 1990

2

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Gate oxide damage and evaluation techniques

Hashimoto, Koichi, Matsunaga, Daisuke, Kanazawa, Masao, Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.

Year:

1993

Language:

english

File:

PDF, 487 KB

english, 1993

3

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Magnetron-Enhanced Etching Of Photoresist For Sub-Micron Patterning

Selino, A., Siegel, M., Lombaerts, R., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 7.95 MB

english, 1990

4

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Monitoring of submicrometer linewidths using diffraction gratings

Chapados, Jr., Phillip, Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.

Year:

1994

Language:

english

File:

PDF, 618 KB

english, 1994

5

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Characteristics of gate oxide surface material after exposure to magnetron-enhanced reactive ion etching plasma

Webb, Jennifer M., Amini, Zahra H., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 367 KB

english, 1991

6

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Optimization Of A Highly Selective Nitride/Oxide Rie In A Batch Etching Machine By Statistical Analysis

Hause, F. N., Stocker, H. J., Lynch, R. O., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 877 KB

english, 1990

7

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Selective metal deposition using low-dose focused ion-beam patterning

Kubena, Randall L., Stratton, Fred P., Mayer, Thomas M., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 263 KB

english, 1991

8

Microarrays (DNA chips) for the classroom laboratory

Betsy Barnard, Michael Sussman, Sandra Splinter BonDurant, James Nienhuis, Patrick Krysan

Journal:

Biochemistry and Molecular Biology Education

Year:

2006

Language:

english

File:

PDF, 101 KB

english, 2006

9

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS

El-Kareh, Badih, Ghatalia, Ashwin, Kellam, Mark D., Maillot, Philippe, Osburn, Carlton M., Zhang, Xiaoqiang, Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.

Year:

1994

Language:

english

File:

PDF, 666 KB

english, 1994

10

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - On-line control of single-wafer plasma etch process

Ha, Sungdo, Sachs, Emanuel, Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.

Year:

1993

Language:

english

File:

PDF, 565 KB

english, 1993

11

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Real-time feedback control of reactive ion etching

Elta, Michael E., Fournier, J. P., Freudenberg, James S., Giles, M. D., Grizzle, Jessy W., Khargonekar, Pramod P., Rashap, Brian A., Terry, Jr., Fred L., Vincent, T., Bondur, James A., Elliott, Kiefer

Year:

1994

Language:

english

File:

PDF, 537 KB

english, 1994

12

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Software integration of in-situ spectroscopic ellipsometry

Maung, Sonny, Henck, Steven A., Duncan, Walter M., Mahlum, Doug, Sheng, Chyi, Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.

Year:

1994

Language:

english

File:

PDF, 612 KB

english, 1994

13

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Review of temperature measurements in the semiconductor industry

Anderson, Richard L., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 668 KB

english, 1991

14

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - A Review of Magnetron Etch Technology

Bobbio, Stephen M., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 5.69 MB

english, 1990

15

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Formation of heterostructure devices in a multichamber processing environment with in-vacuo surface analysis diagnostics and in-situ process monitoring

Lucovsky, Gerald, Kim, Sang S., Fitch, J. T., Wang, Cheng, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 524 KB

english, 1991

16

The Synthesis and Cyclization of Some 2'-Substituted 2-Benzylbenzophenones 1,2

VINGIELLO, FRANK A., SPANGLER, MARTIN O. L., BONDURANT, JAMES E.

Journal:

Journal of Organic Chemistry

Year:

1960

Language:

english

File:

PDF, 475 KB

english, 1960

17

Dry process technology (reactive ion etching)

Bondur, James A.

Journal:

Journal of Vacuum Science and Technology

Year:

1976

Language:

english

File:

PDF, 2.90 MB

english, 1976

18

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - SPEEDIE: a profile simulator for etching and deposition

McVittie, James P., Rey, Juan C., Bariya, A. J., IslamRaja, M. M., Cheng, L. Y., Ravi, S., Saraswat, Krishna C., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 733 KB

english, 1991

19

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Single-crystal silicon trench etching for fabrication of highly integrated circuits

Engelhardt, Manfred, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1.13 MB

english, 1991

20

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Honeywell's submicron polysilicon gate process

Chan, Lap S., Hertog, Craig K., Youngner, D. W., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 571 KB

english, 1991

21

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Dry etching of high-aspect ratio contact holes

Wiepking, Mark, LeVan, M., Mayo, Phyllis, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1.04 MB

english, 1991

22

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Dry etching for silylated resist development

Laporte, Philippe, Van den Hove, Luc, Melaku, Yosias, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 499 KB

english, 1991

23

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Enhanced process control of submicron contact definition

Ostrout, Wayne H., Hunkler, Sean, Ward, Steven D., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 454 KB

english, 1991

24

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Polysilicon etching for nanometer-scale features

Lajzerowicz, Jean, Tedesco, Serge V., Pierrat, Christophe, Muyard, D., Taccussel, M. C., Laporte, Philippe, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 565 KB

english, 1991

25

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Controlling polymer formation during polysilicon etching in a magnetically enhanced reactive ion etcher

Denton, Heidi L., Wallace, Robert M., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.

Year:

1993

Language:

english

File:

PDF, 375 KB

english, 1993

26

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Damage To Gate Oxides In Reactive Ion Etching

Wu, I. W., Bruce, R. H., Koyanagi, M., Huang, T. Y., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 3.36 MB

english, 1990

27

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - From VLSI to ULSI: the subhalf micron challenge

Chatterjee, Pallab K., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1.27 MB

english, 1991

28

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Contamination and damage of silicon surfaces during magnetron-enhanced reactive ion etching in a single-wafer system

Tan, Swie-In, Colavito, D. B., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 590 KB

english, 1991

29

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - LH electron cyclotron resonance plasma source

Kretschmer, K.-H., Lorenz, Gerhard, Castrischer, G., Kessler, I., Baumann, P., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1.12 MB

english, 1991

30

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Plasma diagnostics as inputs to the modeling of the oxygen reactive ion etching of multilevel resist structures

Hope, D. A. O., Hydes, A. J., Cox, Tim I., Deshmukh, V. G. I., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 413 KB

english, 1991

31

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - High-resolution tri-level process by downstream-microwave rf-biased etching

Rangelow, Ivo W., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1.09 MB

english, 1991

32

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Characterization Of Sidewall Passivation Material Deposited During Trench Etch

Vasquez, Barbara, Tompkins, Harland G., Fejes, Peter, Lee, Terrance Y., Smith, Laurel, Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 13.20 MB

english, 1990

33

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - MTF of photolithographic hologram

Guo, Lurong, Guo, Yongkang, Zhang, Xiao-Chun, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 203 KB

english, 1991

34

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Chlorine or bromine chemistry in reactive ion etching Si-trench etching

Rangelow, Ivo W., Fichelscher, Andreas, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 1022 KB

english, 1991

35

CF[sub 4] Etching in a Diode System

Bondur, James A.

Journal:

Journal of The Electrochemical Society

Year:

1979

Language:

english

File:

PDF, 1.05 MB

english, 1979

36

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Real-time monitoring and control of plasma etching

Butler, Stephanie W., McLaughlin, Kevin J., Edgar, Thomas F., Trachtenberg, Isaac, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 522 KB

english, 1991

37

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Semi-integrated SOG/TEOS etchback process for multimetal submicron devices

Iazzi, Nadia, Zanotti, Luca, Bacci, Laura, Vasquez, Patrizia, Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.

Year:

1993

Language:

english

File:

PDF, 478 KB

english, 1993

38

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Measurements on the NIST GEC reference cell

Roberts, James R., Olthoff, James K., Van Brunt, R. J., Whetstone, James R., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 301 KB

english, 1991

39

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Transformer-coupled plasma technology for sub-half-micron etching

Holland, John P., Richardson, Brendan R., Bogle, E., Li, Wai-Man, Melaku, Yosias, Nguyen, Huong T., Peltzer, Eric A., Gates, Duane C., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Te

Year:

1993

File:

PDF, 734 KB

1993

40

Microbial Aerosols from Food-Processing Waste Spray Fields

Don T. Parker, J. Clifton Spendlove, James A. Bondurant and J. H. Smith

Journal:

Journal (Water Pollution Control Federation)

Year:

1977

Language:

english

File:

PDF, 951 KB

english, 1977

41

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Pattern etching and selective growth of GaAs by in-situ electron-beam lithography using an oxidized thin layer

Akita, K., Sugimoto, Yoshimasa, Taneya, Mototaka, Hiratani, Y., Ohki, Y., Kawanishi, Hidenori, Katayama, Yoshifumi, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 772 KB

english, 1991

42

Contributors

Barrington, George M., Blecha, Frank, BonDurant, Robert H., Corbeil, Lynette B., Ellis, John A., Freeman, Albert E., Gershwin, Laurel J., Harp, James A., Henderson, Louise M., Kehrli, Marcus E., Kelm,

Journal:

Veterinary Clinics of North America: Food Animal Practice

Year:

2001

Language:

english

File:

PDF, 686 KB

english, 2001

43

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - A Profile Evolution Model With Redeposition

Jackson, Scott C., Dalton, Timothy J., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 476 KB

english, 1990

44

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Real-time, in-situ measurement of film thickness and uniformity during plasma ashing of photoresist

Davies, John T., Metz, Thomas E., Savage, Richard N., Simmons, Horace O., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 131 KB

english, 1991

45

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - Computer-aided design tools for plasma etchers

Hitchon, W. N. G., Keiter, E. R., Kramer, K. M., Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.

Year:

1993

Language:

english

File:

PDF, 394 KB

english, 1993

46

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - High Rate And Selective Reactive Ion Etching Of Polysilicon

Tsou, L. Y., Bondur, James A., Reinberg, Alan R.

Year:

1990

Language:

english

File:

PDF, 5.11 MB

english, 1990

47

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Expert system and process optimization techniques for real-time monitoring and control of plasma processes

Cheng, Jie, Qian, Zhaogang, Irani, Keki B., Etemad, Hossein, Elta, Michael E., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 394 KB

english, 1991

48

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Focused ion-beam vacuum lithography of InP with an ultrathin native oxide resist

Wang, Yuh-Lin, Temkin, Henryk, Harriott, Lloyd R., Hamm, Robert A., Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 381 KB

english, 1991

49

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Electrical sensors for monitoring rf plasma sheaths

Sobolewski, Mark A., Olthoff, James K., Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.

Year:

1994

Language:

english

File:

PDF, 346 KB

english, 1994

50

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Variable energy neutral beam design and kinetic energy etching

Chen, Lee, Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.

Year:

1994

Language:

english

File:

PDF, 1.36 MB

english, 1994